Research Area
Computer-Integrated Manufacturing of Devices and ICs
Modeling and Simulation (TCAD including process, device and circuit simulator, and NNets).
Statistical and neural network modeling for semiconductor equipments & processes.
Statistical variation for semiconductor processes, devices & ICs.
Reliability modeling for semiconductor devices.
Parametric yield modeling for semiconductor devices and ICs.
1) TCAD Process and Device Modeling
Memory/Optical Devices (NANA Flash, GAA-FET, FinFET, APD, SPAD, LET, etc)
Unit process modeling (Diffusion, etc)
2) Process Diagnosis, Modeling and Control & Integration
Process Integrations (LD/MOS/PD Integrated Device, etc)
Plasma Diagnosis Methodologies \